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Nanomotion SE Series Piezoelectric Motors

High Precision Ceramic Piezoelectric Motors

Nanomotion SE Series motors are high precision ceramic motors that combine unlimited stroke with high positional resolution, in a compact package. The motors are used in applications such as microscopy, precision motion, robotics, and so on. SE Series motors are available in versions that are compatible with ambient air, vacuum and ultra-high vacuum operating environments. These applications include wafer inspection and metrology, scanning stages and lithography. When working with a Nanomotion AB7 Driver in Linear mode, the motors provides a linear response to the input voltage.

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Nanomotion SE Series motors optimise velocity and duty cycle with a new piezo element and motor structure. The SE Series motors support velocities ranging up to 500mm/sec, providing 3X the stiffness of the HR motor and double the efficiency. The increase in motor stiffness supports the ability to work in the sub-nanometer domain, while the higher efficiency supports significantly greater duty cycles particularly in vacuum operation. The SE Series motors are available in standard (-S), vacuum/UHV (-V), and vacuum/non-magnetic (-VN) configurations.

The SE Series motors are currently available in the SE4 and SE8 sizes, yielding 16N and 32N force, respectively. The SE motor family is supported with both the AB7 driver (up to 4 x SE8 motors maximum) and Nanomotion’s XCD drive/control boards.

Drive Strips, Rings, and Disks

Nanomotion supplies ceramic drive strips, rings, and CCS Ceramic Coated Steel for all our motor types. Standard strips, rings and disks are available in a wide variety of sizes and shapes. Nanomotion can also provide custom drive strips/rings for different application requirements. The mating drive surface is critical to the motor’s performance. All specifications are based on using Nanomotion’s drive surfaces. Most of Nanomotion’s standard drive strips are provided with vacuum compatible, double sided tape for easy mounting. The motor user manual defines the proper mounting procedure.

Standard Ceramic Strips:

  • CS-X-XX-XXX (X = Height, XX = Thickness, XXX = Length)
  • CS-10-1.5-200: For use with Edge, Edge-4X and HR1 motors
  • CS-10-3-XXX (XXX available up to 350mm): For use with HR1, HR2 and HR4 motors
  • CS-20-3-XXX (XXX available up to 500mm): For use with HR8 motors

 

CCS (Ceramic Coated Steel):

  • CCS-20-3-XXX : For use with HR1, HR2, HR4 and HR8 motors. Contact Nanomotion for available lengths

 

CR (Ceramic Rings):

  • CR (OD-ID-Height- Radial/Axial use)
  • CR-40-32-10-RA : For use with Edge, Edge-4X, HR1, and HR2 motors
  • CR-60-40-10-RA
  • CR-100-80-10-RA
  • CR-150-130-10-RA

 

Available Lengths:

Length

100 mm, 150 mm, 200 mm, 250 mm, 300 mm, 350 mm, 400 mm, 450 mm, 50 mm, 500 mm

Datasheets

Nanomotion SE Motor User Manual

Nanomotion Motor Catalogue

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