2. »
  3. Products & Services
  4. »
  5. Photonics
  6. »
  7. Nanomotion Piezoelectric Systems
  8. »
  9. Piezoelectric Motors
  10. »
  11. HR Series Motors

Nanomotion HR Series Piezoelectric Motors

High Precision Piezoelectric Ceramic Motors

Nanomotion’s HR Series motors are high-precision ceramic motors available in configurations with 2, 4 and 8 elements. The HR Series combine unlimited travel range with high resolution and compact dimensions. The HR Series motors are available in standard, non-magnetic, vacuum, and UHV configurations.

  • Linear and rotary applications
  • Unlimited travel
  • Wide dynamic velocity range: 1 µm/s to 250 mm/s
  • Dynamic stall force: up to 32N
  • Minimum increment: <10 nm
  • HV and UHV versions available
  • Zero backlash and holds position at power off
  • Silent operation
  • Non-magnetic and negligible EMI
Need Assistance or Pricing?

OVERVIEW OF THE HR MOTORS
The HR series motors are high precision ceramic motors. The HR motors combine unlimited stroke with high position resolution, in compact dimensions. The motors are used in applications such as microscopy, precision motion, robotics, etc. The HR motors are available in versions that are compatible with vacuum and ultra-high vacuum operating environments. These applications include wafer inspection and metrology, scanning stages and lithography. When working with a Nanomotion AB05 Driver, the motors provide a linear response to the input voltage. The operation of the motor and driver resembles that of a DC-motor driven by a voltage amplifier.

HR MOTOR SYSTEM

An HR motor is part of a motion system consisting of the following parts:

HR Motor

  • Standard motors provided with a 3m shielded and jacketed cable.
  • Vacuum motors provided with a 3m shielded cable.
  • UHV motors provided with 0.5m flying leads (3 wires).

 

Ceramic

  • Driving Strip – for linear applications.
  • Driving Ring/Disk – for rotary applications.

 

Driver

  • AB01, AB02, AB04 Driver with a Controller with a servo rate >8KHz.
  • AB05 Driver with standard Controller with servo rate > 4KHz (20KHz recommended).
  • XCD Controller/Driver or compatible third party driver.

 

Optional encoder to provide position feedback

Motor and Controller/Driver

HR1 – AB1A, AB1A-3U, AB02, AB4, AB5/51, XCD-HR1.

HR2 – AB1A, AB1A-3U, AB02, AB4, AB5/51, XCD-HR2.

HR4 – AB1A, AB1A-3U, AB02, AB4, AB5/51, XCD-HR4.

HR8 – AB1A, AB1A-3U, AB02, AB4, AB5/51, XCD-HR8, XCD-HR16.

Performance Specifications

Specification

HR1

HR2

HR4

HR8

Maximum Allowable Velocity

250 mm/sec

250 mm/sec

250 mm/sec

250 mm/sec

Dynamic Stall Force

3.5 to 4.5 N

7 to 9 N

15-18 N

30-36 N

Static Holding Force Reference value

3.5 N

7 N

14 N

28 N

Non-Energised Stiffness

0.8 – 1
N/µm

1.4 – 8
N/µm

2.3 – 2.8
N/µm

3.3-3.8
N/µm

Nominal Preload on
Stage

18 N

36 N

72 N

144 N

Kf  – Driver and command dependent

0.5 – 1
N/Volt

1 – 2
N/volt

2 – 4
N/Volt

4
N/Volt

Kfv

12 to18
N·sec/m

24 – 36
N·sec/m

60-72
N·sec/m

120-144
N·sec/m

Offset

1 – 2 V – Driver dependent

Nominal Lifetime

20,000 hours under nominal operating conditions

Maximal Voltage
39.6 KHz, sine wave

280 Vrms

280 Vrms

270 Vrms

270 Vrms

Typical motor current at
max voltage
(Cable length dependent)

120
mA rms

250
mA rms

320
mA rms

600
mA rms

Maximum Power Con-sumption

5 W

10 W

20 W

40 W

Length:

40.5 mm

40.5 mm

42 mm

41.9 mm

Width:

25.7 mm

25.7 mm

46.6 mm

46.6 mm

Height:

8 mm

12.7 mm

15 mm

23.8 mm

Weight – standard motor

20g

40g

73g

120g

Weight – high & ultra-high vacuum motors

30g

30g

60g

170g

Ambient Temperature:

0 – 50º C

Storage:

-40 to +70º C

Humidity:

0 – 80% non-condensing

Vacuum level for high-vacuum motors

1e-7 torr (guaranteed only after baking)

Vacuum level for ultra-high-vacuum motors

1e-10 torr (guaranteed only after baking)

Maximum baking temperature for vacuum motors

120º C for standard motors
140º C – for ultrahigh vacuum motor

Drive Strips, Rings, and Disks

Nanomotion supplies ceramic drive strips, rings, and CCS Ceramic Coated Steel for all motor types. Standard strips, rings and disks are available in a wide variety of sizes and shapes. Nanomotion can also provide custom drive strips/rings for different application requirements. The mating drive surface is critical to the motor’s performance. All specifications are based on using Nanomotion’s drive surfaces. Most of Nanomotion’s standard drive strips are provided with vacuum compatible, double-sided tape for easy mounting. The motor user manual defines the proper mounting procedure.

Standard Ceramic Strips:

  • CS-X-XX-XXX (X = Height, XX = Thickness, XXX = Length).
  • CS-10-1.5-200: For use with Edge, Edge-4X and HR1 motors.
  • CS-10-3-XXX (XXX available up to 350mm): For use with HR1, HR2 and HR4 motors.
  • CS-20-3-XXX (XXX available up to 500mm): For use with HR8 motors.

 

CCS (Ceramic Coated Steel):

  • CCS-20-3-XXX : For use with HR1, HR2, HR4 and HR8 motors. Contact Nanomotion for available lengths.

 

CR (Ceramic Rings):

  • CR (OD-ID-Height- Radial/Axial use)
  • CR-40-32-10-RA : For use with Edge, Edge-4X, HR1, and HR2 motors
  • CR-60-40-10-RA
  • CR-100-80-10-RA
  • CR-150-130-10-RA

 

Available Lengths:

Lengths (mm)

100, 150, 200, 250, 300, 350, 400, 450, 50, 500

Manual

Nanomotion Standard HR Motors Manual

Nanomotion Motor Catalogue

Thank You

The form was submitted successfully. 

Product Enquiry

Please complete all required fields.

Topics






Datenschutzeinwilligung*